Functional & Dynamic 3D Nano- MicroDevices by Direct Multi-Photon Lithography

Micro & Nano Electro-Mechanical Systems (MEMS/NEMS) have a huge impact on the market in different areas ranging from consumer to automotive. Nevertheless, their real potential is largely unexplored. This because their development is a long and very expensive process, which often requires long simulation steps. Moreover, arbitrary complex 3D structures cannot be even produced with standard micro/nano-fabrication techniques. 5D NanoPrinting project aims to overcome these limitations, providing an innovative integrated technological approach, based on two-photon 3D direct printing processes. Breakthrough processes for 3D Nano- MicroDevices (NEMS/MEMS) rapid prototyping will be developed, aspiring to become a novel gold standard for micro/nano-technologies, similarly to what 3D printing represented for manufacturing technologies in the last decade. The approach will be based on new ad hoc-developed functional materials, polymerisable via two photon process, exploiting designed/tailored functional properties. In particular, to create complete NEMS/MEMS, a set of basic properties is required, including the possibility to have graded structural, patternable, conductive, and stimuli-responsive materials. Such complex functional materials, compatible with two photon lithographic process, have been not yet demonstrated; then, new suitable materials will be developed combining synthetic and nano-technological approaches. Expected innovation brought by the project will be not limited only to material science, but a great impact at levels of process and system is also expected. Respect to traditional micro/nano-fabrication technologies, the proposed one will be specifically used for: o Rapid prototyping, to test new principles and configurations before final device design o Production of 3D complex or of customizable devices (parametric devices production, e.g. multi-axial nano-force sensors) o Production of low numbers/high added value devices (e.g. cochlear implants).